Multijunction photovoltaic device having sige(sn) and gaasnsb cells

ABSTRACT

A multijunction tandem photovoltaic device is disclosed having a bottom subcell of silicon germanium or silicon germanium tin material and above that a subcell of gallium nitride arsenide antimonide material. The materials are lattice matched to gallium arsenide, which preferably forms the substrate. Preferably, further lattice matched subcells of gallium arsenide, indium gallium phosphide and aluminium gallium arsenide or aluminium indium gallium phosphide are provided.

The present invention relates to photovoltaic devices having more thanone subcell for absorbing different parts of the spectrum of theincident light.

BACKGROUND

Multijunction photovoltaic devices comprise a series of subcells eachhaving a light absorbing semiconductor material and a p-n junctiontherein to separate the photocarriers, to produce the photocurrent. Theywork by having a top subcell, i.e. that first exposed to the incidentlight, that has a large bandgap and so absorbs the shorter wavelengthsin the incident light only and passes the longer wavelengths, with thenext subcell having a smaller bandgap so that it can absorb part of thelight passed by the subcell above, and so on. Solar cells are, ofcourse, one kind of photovoltaic device and are ones used to convertsunlight into electricity for the purpose of generating power.

In this document “top” and “bottom” are to be understood in that sense,i.e. the top subcell is that which receives the incident light first innormal use, rather than the actual spatial orientation of the device.“Above” and “below” are also to be understood similarly, unless thecontext demands otherwise. Further light is not to be understood asvisible light only. For example 1.0 eV and 0.7 eV bandgaps discussed inthis document absorb light in the infra-red region.

Multijunction photovoltaic devices often use lattice matched material,which is to say that when one material is grown on another the latticeparameters of the two materials match to an extent that the crystalstructure of the material being grown is maintained and strain relievingdislocations are not introduced. When the lattice parameters of the twomaterials, in the bulk form, are not quite equal the layer being grownbecomes strained, i.e. its lattice parameter changes to match that ofthe layer on which it grown. Where the strain is quite small the layerbeing grown can be grown to an arbitrary thickness without theintroduction of dislocations. The thickness at which strain relievingdislocations first appear is defined as the critical thickness for amaterial. In this context, the term lattice matched would also refer tostrained layers grown to thicknesses below the critical thickness. Someexamples of known multijunction solar cells are as follows.

US2009/00140161 (Harris) describes a triple junction solar cell as shownin FIG. 1 of the present application. The structure is an InGaP topsubcell, a GaAs middle subcell and a GaInNAsSb bottom subcell, alllattice matched to a GaAs substrate. The aim stated by this document isto improve on the efficiency of a record holding InGaP/InGaAs/Ge solarsubcell. For the GaInNAsSb material, it discloses, a bandgap of 0.9 to1.3 eV and that it can be lattice matched to GaAs, which has a bandgapof 1.42 eV, so a GaInNAsSb subcell can be used to absorb the longerwavelengths passed by the GaAs subcell above it. The proposedproportions of In, N and Sb are respectively 0.05 to 0.07, 0.01 to 0.02and 0.02 to 0.06. The document discloses experimental results comparingGaInNAsSb junctions to GaInNAs ones with the former achieving a betterinternal quantum efficiency and so it claims “The GaInNAsSb materialsystem on substrate [GaAs] (FIG. 1A) represents one of the smallestbandgaps ever achieved (0.92 eV) in a dilute nitride solar subcell withhigh carrier collection efficiency.” Further it notes a merit of a 0.92eV bandgap which is that since there is little energy in the solarspectrum between 0.85 eV and 0.92 eV due to atmospheric absorption,subcells with just smaller bandgaps than that will not provide extraphotocurrent. Later it concludes, “Since GaInNAsSb-containing devicesproduce sufficient current this shows that using this material, ratherthan Ge, as the bottom junction in a triple-junctionGaInP/GaAs/GaInNAsSb device has the potential to increase the powerconversion efficiency of triple junction subcells according to theinvention by increasing the open-circuit voltage of the devices.”

US2011/0232730 (Jones) proposes a lattice matched triple junction solarcell having a similar set of subcells to that of Harris. FIG. 2 of thepresent application shows this structure. Again, the proposed bottomsubcell 21 is GaInNAsSb, but the material is described as “low Sb,enhanced In and N”. More specifically the proposed proportions of In, Nand Sb are respectively 0.07 to 0.18, 0.025 to 0.04 (higher than Harris)and 0.001 to 0.03 (generally lower than Harris). The subcells arelattice matched to the substrate. Possibilities of an Al component inthe top subcell 23 and of an In component in the middle subcell 22,marked in FIG. 2, are disclosed. These enable the materials to belattice matched to Ge, when that is the substrate. This document alsoproposes that when the substrate is Ge there may be a fourth subcell inthat substrate.

US2011/0083729 (Lee) also discloses a triple junction solar cell. Thestructure of Lee is shown in FIG. 3 of the present application. Againthe top subcell 33 is InGaP, but the middle subcell 32 is GaNAs and thebottom subcell 31 is SiGe. The document notes a problem with Ge bottomsubcells, which is that because of the small bandgap the currentproduced by Ge subcells is high compared to GaAs and InGaP top andmiddle subcells leading to inefficiency. The SiGe actually used has ahigher bandgap and produces a current that matches that of the InGaP andGaNAs top and middle subcells proposed. In this device the latticematching is limited. In one example, the top, middle and bottom subcellsare lattice matched to each other at 5.641 Å with the subcells havingthe following compositions Ga_(0.544)In_(0.456)P,GaN_(0.0092)As_(0.9908), and Si_(0.04)Ge_(0.96). However these subcellsare not lattice matched to the substrate 30, which may be of variousmaterials, and a metamorphic buffer layer 34 is employed to reduce thestrain. This is produced by changing the composition of the buffer layerwhile it is grown to change the lattice parameter, which is not only acomplex operation but will introduce defects into the structure.

GB2467934, also owned by the present applicant company, discloses amultijunction solar subcell, shown in FIG. 4 of the present application,which has a InGaP top subcell 43, a GaAs middle subcell 2 and a SiGesubcell 41, all lattice matched to a GaAs substrate 40.

WO2009/157870 (Yoon) discloses an advantageous method for fabricatingGaNAsSb, which method, as is explained below, may be used in thepreferred examples of the invention. The disclosure of this document isincorporated herein by reference.

SUMMARY OF INVENTION

According to the present invention there is provided a multijunctionphotovoltaic device comprising:

-   -   a set of semiconductor material layers, the layers including:    -   a first light absorbing layer of silicon germanium or silicon        germanium tin material including a photocarrier separating p-n        junction,    -   a second light absorbing layer of gallium nitride arsenide        antimonide material including a photocarrier separating p-n        junction,    -   wherein the silicon germanium or silicon germanium tin layer and        the gallium nitride arsenide antimonide layer are lattice        matched to gallium arsenide.

The multijunction photovoltaic device may further comprise a lightabsorbing layer of gallium arsenide material including a photocarrierseparating p-n junction.

The multijunction photovoltaic device may further comprise a lightabsorbing layer of indium gallium phosphide including a photocarrierseparating p-n junction and being lattice matched to gallium arsenide.

The multijunction photovoltaic device may further comprise a lightabsorbing layer of aluminium gallium arsenide including a photocarrierseparating p-n junction and being lattice matched to gallium arsenide.

The multijunction photovoltaic device may further comprise a lightabsorbing layer of aluminium indium gallium phosphide including aphotocarrier separating p-n junction and being lattice matched togallium arsenide.

These additional layers absorb shorter wavelengths than the silicongermanium, or silicon germanium tin, and gallium nitride arsenideantimonide layers.

The multijunction photovoltaic device may comprise a gallium arsenidesubstrate, the set of layers being on and lattice matched to thesubstrate. Alternatively the multijunction photovoltaic may comprise asubstrate that is lattice matched to gallium arsenide, the set of layersbeing on and lattice matched to the substrate.

The multijunction photovoltaic device may be a solar cell.

The present invention also provides a method of making a multijunctionphotovoltaic device comprising:

-   -   providing a substrate of gallium arsenide or another material        that is lattice matched to gallium arsenide,    -   growing a first light absorbing layer of silicon germanium or        silicon germanium tin material, including a photocarrier        separating p-n junction, lattice matched to the substrate,    -   growing a second light absorbing layer of gallium nitride        arsenide antimonide material, including a photocarrier        separating p-n junction, lattice matched to the first light        absorbing layer.

The method may comprise growing a light absorbing layer of galliumarsenide material, including a photocarrier separating p-n junction.

The method may comprise growing a light absorbing layer of indiumgallium phosphide, including a photocarrier separating p-n junction,lattice matched to gallium arsenide.

The method may comprise growing a light absorbing layer of aluminiumgallium arsenide, including a photocarrier separating p-n junction,lattice matched to gallium arsenide.

The method may comprise growing a light absorbing layer of aluminiumindium gallium phosphide, including a photocarrier separating p-njunction, lattice matched to gallium arsenide.

The method may comprise providing at least one further layer between twoneighbouring ones of the said light absorbing layers, the at least onefurther layer being lattice matched to gallium arsenide.

The method may comprise removing the substrate.

Preferably the light absorbing layers are arranged in order of bandgap.This may often mean that they are grown in order of bandgap but it wouldbe possible to grow only some of the light absorbing layers, remove thesubstrate and continue growth in the other direction (a substrateusually being provided on the other side).

The light absorbing layers with their p-n junctions of the inventionmay, as is known in the art, each be comprised in a respective region ofa multijunction photovoltaic device conventionally known as a subcell,which may have further layers.

The gallium nitride arsenide antimonide subcell and silicon germanium,or silicon germanium tin, subcell of the invention are able between themto provide good absorption coverage of the spectral wavelengths longerthan those absorbed by, for example, a gallium arsenide subcell,offering high absorption efficiency. This is in contrast of the approachof US2009/00140161 (FIG. 1) and US2011/0232730 (FIG. 2) which have onlyone such subcell, and in those the subcell is of a different and morecomplex material, namely GaInNAsSb. Further, the former documentexplicitly states that the goal is to have as small a bandgap aspossible for the GaInNAsSb. Also, in US2011/0083729 (FIG. 3) there areGaNAs and SiGe layers that absorb in this general area of the spectrumbut GaNAs cannot be lattice matched to GaAs which means that in thatdevice a strain relieving buffer layer has to be used between itssubcells and the substrate. Further this device has no subcell in the1.4 eV region that would be provided by GaAs, and none could be providedsimply because it would not lattice match the GaNAs—further, the InGaPsubcell in this device would in order to lattice match GaNAs have alarger bandgap (by changing the proportion of In and Ga) than the InGaPsubcell used in the examples of the present invention which is latticematched to GaAs, leaving a large gap in the absorption spectrum of thedevice of US2011/0083729.

As noted above, subcells, both in the invention and as is knowngenerally in the art, may comprise additional layers. For example, as isknown in the art, tunnel contacts may be inserted between the lightabsorbing subcells of multijunction photovoltaic devices, and these maybe so used in the present invention, to provide good electricalconnection between the subcells, and to allow the p-n junction in theneighbouring subcells to have the same polarity so that current may flowthrough the device. Window layers and back surface field (BSF) layers,as also known in the art, are preferably also incorporated into thestructure of the device of the invention. A window is usually providedat the top of each cell and a back surface field at the bottom of eachsubcell and these are preferably provided in the invention. However, asnoted later the invention does provide an advantage in relation tothese.

BRIEF DESCRIPTION OF THE DRAWINGS

Examples of the invention will now be described, with reference to theaccompanying drawings of which:

FIG. 1 shows the subcells of a first known multijunction solar cell,

FIG. 2 shows the subcells of a second known multijunction solar cell,

FIG. 3 shows the subcells of a third known multijunction solar cell,

FIG. 4 shows the subcells of a fourth known multijunction solar cell,

FIG. 5 shows the subcells of a first example of a multijunctionphotovoltaic device in accordance with the invention,

FIG. 6 shows the subcells of a second example of a multijunctionphotovoltaic device in accordance with the invention,

FIG. 7 is a graph showing the bandgap of GaAs and GaNAs of variouscompositions and the possibilities of bandgap of GaNAsSb when latticematched to GaAs, and

FIG. 8 is a graph showing the bandgap and lattice parameter of the alloySiGeSn, showing that it can be lattice matched to GaAs with a bandgaprange of 0.66-˜1.1 eV.

EXAMPLES

FIG. 5 shows the subcells of first example of a multijunctionphotovoltaic device, in particular a solar cell, in accordance with theinvention. This comprises a series of subcells to absorb incident light,formed on a GaAs substrate 50. The light is first incident on thesubcell 54, which in this example is furthest from the substrate, withlight not absorbed by each subcell passing to the next. In this examplethere are a top subcell 54 comprising a light absorbing layer of InGaPmaterial, an upper middle subcell 53 comprising a light absorbing layerof GaAs 52 and a lower middle subcell comprising a light absorbing layerof GaNAsSb material and a bottom subcell 51 comprising a light absorbinglayer of SiGe material, all of which are lattice matched to a GaAssubstrate 50. The light absorbing material layer of each of thesesubcells contains a p-n junction to separate the photocarriersgenerated. Preferably the cells are connected in series (tandem cell).

In this example, additional layers, which are tunnel contacts (which areprovided between the subcells to provide good electrical contact),windows and back surface fields, are incorporated into the structure.These are between the subcells and above and below the light absorbinglayers as appropriate. These additional layers are also lattice matchedto the GaAs substrate, but as their use is well known in the art and forsimplicity of illustration these layers not shown in FIG. 5 (similarlyfor FIG. 6). Because all the layers are lattice matched, including tothe substrate, this reduces the cost of manufacture and enhances deviceperformance, reliability and yield. Another advantage of this example isthe ability, compared to devices having a Ge substrate with a lightabsorbing subcell in that, to put a back surface field (BSF) below thep-n junction of SiGe bottom sub-cell for enhanced device performance.Additionally, a sacrificial release layer that has a differential etchrate to GaAs may be grown below the SiGe subcell. This permits theepitaxial layer structure containing the subcells to be removed from theGaAs substrate and transferred to a suitable handle or heat sink,allowing the GaAs substrate to be re-used and if needed reducing theweight of the device. These additional layers are grown epitaxially onthe GaAs substrate before the SiGe subcell is grown. Alternatively thesubcells may be grown in reverse order on a GaAs substrate (or asubstrate lattice matched to GaAs) starting with the widest bandgapsubcell (the InGaP subcell in the case of FIG. 5) and then followed bythe narrower bandgap subcells in order (the GaAs subcell, then theGaNAsSb subcell and then the SiGe/SiGeSn subcell in the case of FIG. 5).A sacrificial layer is provided between the widest bandgap subcell andthe GaAs substrate allowing the subcells to be removed and transferredto a suitable handle or heat sink, inverted so that the narrowestbandgap cell is next to the handle or heart sink and the widest bandgapcell receives the incident light first.

The composition of the light absorbing GaNAsSb layer of subcell 52 issuch that its bandgap is preferably in the range 0.8<E_(g)<1.2 eV. Abandgap of around 1.0 eV is particularly advantageous since it fills thegap between the parts of the spectrum absorbed by the SiGe and GaAslayers.

FIG. 7 is a graph showing the bandgap of various Group III-Vsemiconductor materials and Group IV materials versus their latticeparameter. There are of course numerous III-V materials but the onesshown are selected either to illustrate the GaNAsSb material used in thelight absorbing layer of subcell 52 of the invention or for generalcomparison with well-known materials. In particular a solid line 71extends between the points for GaAs and GaSb giving the values for theternary compound GaAs_(1-y)Sb_(y) as the proportion y of Sb atomsvaries. Dotted line 72 extending from the point for GaAs towards thatfor GaN, which is off the graph shown at a smaller lattice parameter,giving the values for the ternary compound GaAs_(1-x)N_(x) as theproportion x of N atoms varies. This Figure shows that the substitutionof a proportion the As atoms in GaAs by either N or Sb to GaAs reducesthe bandgap (even to the range of that of Ge—while it is not practicalto add more than a few percent of N that is sufficient to reach thebandgap of Ge). However substituting in N reduces the lattice parameter,while substituting in Sb increases the lattice parameter. It turns outthat substituting in both N and Sb for As, i.e. to form the quaternarymaterial GaN_(x)As_(1-x-y)Sb_(y), still causes the bandgap to decreasefrom that of GaAs and with certain proportions of N and Sb the materialis lattice matched to GaAs (the effects on lattice parameter of N and Sbcancelling each other out). An exact lattice match to GaAs is shown bythe vertical dashed line, but strained materials having layerthicknesses below the critical thickness are also possible and lie toeither side of the dashed line. The shaded area shows possibilities forthe quaternary GaNAsSb having bandgaps of the most interest in theinvention. Note, in particular, that the region neighbouring the dashedvertical line (which is the lattice matched region) that is within theshaded area also does include bandgaps in the region of 1 eV betweenthat of SiGe (around 0.7 eV) and GaAs (around 1.4 eV).

The precise proportions of N and Sb in the GaNAsSb for a particularbandgap and lattice matching can of course be experimentally determinedeasily for any particular case. However for lattice matching to GaAs theratio of N to Sb is about 1:2.6. For bandgaps equal to GaAs (1.4 eV)down to 0.9 eV the respective proportion of N and Sb, x and y, in thematerial lie in the range 0<x<6% and 0<y<16%.

To make the SiGe light absorbing layer in subcell 51 lattice matched toGaAs the proportion of silicon is around 0.018 and this material thenhas a bandgap of around 0.7 eV. As can be seen in FIG. 8, which isanother graph showing the bandgap of various Group III-V semiconductormaterials and Group IV materials versus their lattice parameter, Ge isnot lattice matched to GaAs but as the difference is not large only asmall amount of Si needs to be added to achieve the lattice matching.Since SiGe is a binary compound there is only one degree of freedomprovided by the proportion of the atoms and so the bandgap is fixed ataround 0.7 eV if the lattice match to GaAs is to be maintained.

However, if desired a larger bandgap can be obtained for subcell 51 byusing SiGeSn instead of SiGe. This material is lattice matched to GaAswhere the ratio of Si to Sn is approximately 4:1. Where for example theproportion of Si is 2% and that of Sn is 0.5% this provides a largerbandgap than SiGe lattice matched to GaAs, where the proportion of Si is8% and that of Sn is 2% the bandgap is wider, and where the proportionsare much larger the bandgap can extend further.

FIG. 6 shows the subcells of a second example of the invention. Thisdevice is as that of FIG. 5 but it has an additional subcell 55 having alight absorbing layer and a photocarrier separating p-n junction locatedabove the InGaP subcell 54. This subcell 55 absorbs part of the spectrumabove around 2.0 eV and allows longer wavelengths to be absorbed by theInGaP subcell 54 and the subcells below that. The material of the lightabsorbing layer of this subcell 55 in this example is AlGaAs having aproportion of Al and Ga having the desired bandgap. This material islattice matched to GaAs, although strained, at all proportions of Al toGa, and can be grown to thicknesses required for a photovoltaic deviceto have sufficient absorption without any strain relaxation.

In another similar example the light absorbing material layer of subcell55 is AlInGaP lattice matched to GaAs. Again the bandgap of ispreferably about 2.0 eV but since the material is a quaternary someextra flexibility is obtained.

The subcells examples of FIGS. 5 and 6 described above do not, as ispreferred, have further subcells between them. That is however possiblewith preferably the bandgaps of the light absorbing materials of theintervening subcells being between that of their neighbours.

Note also that while the substrate of the examples is GaAs the inventionalso extends to cases where the substrate on which the subcells aregrown is another material that is lattice matched to GaAs.

Note further that if not needed for certain applications any one or moreof subcells 53, 54 or 55 can be omitted.

The materials of the subcells may be grown using epitaxial techniquesincluding MBE and MOCVD.

For example, GB2467934, also owned by the present applicant company andmentioned above, discloses examples of SiGe materials manufactured onGaAs substrates. The document is incorporated herein by reference. Thesematerials can be grown using an epitaxy process, using a germaniumcontaining precursor (e.g GeH₄, GeCl₄, etc.) and a silicon containingprecursor (e.g. SiH₄, SiH₂Cl₂, SiHCl₃, disilane etc.) with a carrier gas(e.g. H₂). The p-n junction used to separate the photo carriers may beformed in the SiGe material by various methods. These include dopingduring the epitaxial growth, or by diffusion in of dopant into a layerof the material when it is grown or is partially grown. An alternativemethod is given below.

The SiGe or SiGeSn material used in subcell 51 will in many exampleshave III-V material directly grown on it. There may then be diffusion ofGroup V atoms from the III-V material into the SiGe or SiGeSn. Arsenicatoms, for example, will do this. Arsenic in SiGe or SiGeSn is an n-typedopant.

So if the SiGe or SiGeSn neighbouring the III-V material grown on it isp-type then the Group V atoms diffusing into the SiGe or SiGeSn may welldope the SiGe or SiGeSn forming a p-n junction below the surface of theSiGe or SiGeSn. (If this junction were to be parasitic in a particularexample it can be prevented or controlled by forming a thin Si diffusionbarrier between the SiGe or SiGeSn. Three atomic layers is sufficient.)However, as foreshadowed, the junction so formed can be utilised as thephotocarrier separating junction in the SiGe or SiGeSn subcell.Alternatively it may be used as a tunnel diode between the SiGe orSiGeSn subcell and the subcell grown on that. A thinner Si barrier canbe used to control the amount of diffusion if that is desired.

On the other hand if the SiGe or SiGeSn neighbouring III-V materialgrown on it is n-type (i.e. an epitaxially grown SiGe or SiGeSn p-njunction) the diffusion in of Group V atoms will not form an extra p-njunction.

The GaNAsSb of the invention layer is also formed by epitaxy. The p-njunction for separating the photocarriers therein is formed either bydoping during the epitaxial growth, or, alternatively, after the layer,or part thereof has been grown and diffusing the dopant in. The abovementioned WO2009/157870 described a particularly advantageous method forgrowing this material.

GB2467934, and also GB2467935 also owned by the present applicant,describe techniques that may be employed in the present invention toremove the GaAs substrate from the rest of the device. Those documentsare therefore incorporated by reference. This is useful, for example, toreduce weight of the device (useful for space applications), to allow aheat sink to be bonded to the device or to allow the substrate to bere-used to reduce cost.

The GaAs substrate may be removed when all the subcells have been grownin order on it (which may be in either order). Alternatively the GaAssubstrate can be removed at any point during the growth and that may bepart way through a subcell including partway through the just one cell.In these methods a new substrate is mounted on the just grown surface.

1. A multijunction photovoltaic device comprising: a set ofsemiconductor material layers, the layers including: a first lightabsorbing layer of silicon germanium or silicon germanium tin materialincluding a photocarrier separating p-n junction, a second lightabsorbing layer of gallium nitride arsenide antimonide materialincluding a photocarrier separating p-n junction, wherein the silicongermanium or silicon germanium tin layer and the gallium nitridearsenide antimonide layer are lattice matched to gallium arsenide.
 2. Amultijunction photovoltaic device as claimed in a claim 1 furthercomprising a light absorbing layer of gallium arsenide materialincluding a photocarrier separating p-n junction.
 3. A multijunctionphotovoltaic device as claimed in claim 1 further comprising a lightabsorbing layer of indium gallium phosphide including a photocarrierseparating p-n junction and being lattice matched to gallium arsenide.4. A multijunction photovoltaic device as claimed in claim 1 furthercomprising a light absorbing layer of aluminium gallium arsenideincluding a photocarrier separating p-n junction and being latticematched to gallium arsenide.
 5. A multijunction photovoltaic device asclaimed in claim 1 further comprising a light absorbing layer ofaluminium indium gallium phosphide including a photocarrier separatingp-n junction and being lattice matched to gallium arsenide.
 6. Amultijunction photovoltaic device as claimed in claim 1 comprising agallium arsenide substrate, the set of layers being on and latticematched to the substrate.
 7. A multijunction photovoltaic device asclaimed in claim 1 comprising a substrate that is lattice matched togallium arsenide, the set of layers being on and lattice matched to thesubstrate.
 8. A multijunction photovoltaic device as claimed in claim 1wherein the photovoltaic device is a solar cell.
 9. A method of making amultijunction photovoltaic device comprising: providing a substrate ofgallium arsenide or another material that is lattice matched to galliumarsenide, growing a first light absorbing layer of silicon germanium orsilicon germanium tin material, including a photocarrier separating p-njunction, lattice matched to the substrate, growing a second lightabsorbing layer of gallium nitride arsenide antimonide material,including a photocarrier separating p-n junction, lattice matched to thefirst light absorbing layer.
 10. A method as claimed in claim 9comprising growing a light absorbing layer of gallium arsenide material,including a photocarrier separating p-n junction.
 11. A method asclaimed in claim 9 comprising growing a light absorbing layer of indiumgallium phosphide, including a photocarrier separating p-n junction,lattice matched to gallium arsenide.
 12. A method as claimed in claim 9comprising growing a light absorbing layer of aluminium galliumarsenide, including a photocarrier separating p-n junction, latticematched to gallium arsenide.
 13. A method as claimed in claim 9comprising growing a light absorbing layer of aluminium indium galliumphosphide, including a photocarrier separating p-n junction, latticematched to gallium arsenide.
 14. A method as claimed in claim 9comprising providing at least one further layer between two neighbouringones of the said light absorbing layers, the at least one further layerbeing lattice matched to gallium arsenide.
 15. A method as claimed inclaim 9 comprising removing the substrate.